1. Overhaul and trading of the power sources and subsystems in the semconductor industry.RF/DC/Microwave power sources, ETO system/parts, Ozone generator, Ozone sensor, CMP motor, RPS. | 3. Technical servicea. System diagnosis and debugging of ETO system. b. Plasma characteristics measurements and analysis for semconductor manufacturing plasma process. c. Training courses. |
2. System upgradea. ETO system. b. RPS |
4. New Productsa. RPS perfomance monitor. b. Microwave transmitted/reflected power monitor. |