APR-600 Advanced Gas Pressure Regulator

APR-600 Advanced Gas Pressure Regulator
 

APR-600 Advanced Gas Pressure Regulator

 

Control Range

 

0-100 PSIA

 
 

Accuracy

 

±1% of Full Scale.

 
 

Response Time

 

0.5 sec. To 95%

 
 

Flow:

 

5.0 LPM, 20 LPM, 30 LPM

 
 

Temperature Range:

 

5 to 45°C

 
 

Warm-Up Period

 

less than 2 minutes

 
 

Power Requirement:

 

12-18V, (maximum current 0.5A)

 
 

Interface:

 

compatible with MKS 640A DB15 pin interface)

 
 

APR-600 Advanced Gas Pressure Regulator

 

Control Range

 

0-100 PSIA

 

 

Accuracy

 

±1% of Full Scale.

 

 

Response Time

 

0.5 sec. To 95%

 

 

Flow:

 

5.0 LPM, 20 LPM, 30 LPM

 

 

Temperature Range:

 

5 to 45°C

 

 

Warm-Up Period

 

less than 2 minutes

 

 

Power Requirement:

 

12-18V, (maximum current 0.5A)

 

 

Interface:

 

compatible with MKS 640A DB15 pin interface)

 

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