明遠精密科技股份有限公司

RF Generator
- Advanced Energy
- MKS

DC Power Supply
- DC Power Supply

RPS
- RPS

Ozone Generator
- Ozone Generator

Ozone Sensor
- O3 Sensor

Microwave
- Microwave

ETO
- ETO

Motor
- Motor

O3 Sensor

Manufacturer	Model	Max Flow (slm)
INUSA	gFFOZ	15
TELEDYNE	M452	5