Our major business scopes are:
1. Overhaul and trading of the power sources and subsystems in the semconductor industry.RF/DC/Microwave power sources, ETO system/parts, Ozone generator, Ozone sensor, CMP motor, RPS. 3. Technical servicea. System diagnosis and debugging of ETO system.
b. Plasma characteristics measurements and analysis for semconductor manufacturing plasma process.
c. Training courses.
2. System upgradea. ETO system.
b. RPS
4. New Productsa. RPS perfomance monitor.
b. Microwave transmitted/reflected power monitor.