|1. Overhaul and trading of the power sources and subsystems in the semconductor industry.RF/DC/Microwave power sources, ETO system/parts, Ozone generator, Ozone sensor, CMP motor, RPS.||3. Technical servicea. System diagnosis and debugging of ETO system.
b. Plasma characteristics measurements and analysis for semconductor manufacturing plasma process.
c. Training courses.
|2. System upgradea. ETO system.
|4. New Productsa. RPS perfomance monitor.
b. Microwave transmitted/reflected power monitor.